搜索结果: 1-1 共查到“分析化学 low temperature”相关记录1条 . 查询时间(0.109 秒)
Evaluation of Outermost Surface Temperature of Silicon Substrates during UV-Excited Ozone Oxidation at Low Temperature
Evaluation Outermost Surface Temperature Silicon UV-Excited Ozone Oxidation Low Temperature
2010/9/17
Using ultraviolet (UV)-excited ozone gas, we prepared high-quality SiO2 films that can be used as gate dielectric films on poly-silicon or silicon wafers without sample heating. The UV-excited ozone g...